About us
MetaThermo (Suzhou) Energy Technology Co., Ltd. was founded in 2023 and is located in Science and Education New Town, Taicang City, Suzhou. The company specializes in the R&D and manufacturing of microfabrication plasma equipment and thermal characterization testing equipment, and offers related instrument customization, material processing, sample fabrication and testing services. We are committed to delivering competitive instruments and high-quality services for scientific research, integrated circuits and the broader semiconductor industry.
MetaThermo has partnered with the Laboratory of Semiconductor Materials and Devices, Jiangnan University, and possesses expertise in flexible plasma and atmospheric plasma technologies. Our multi-functional wide-density plasma system combines capacitive and inductive discharge modes. It delivers versatile surface modification for advanced materials over a wide density range, including layer-by-layer thinning of 2D materials for micro/nano device fabrication. Atmospheric plasma technology serves material processing scenarios including biomedicine, wafer cleaning, sample cleaning and carbon fiber surface activation.
MetaThermo independently develops a series of thermal characterization instruments: dual-laser Raman thermal conductivity analyzers, frequency-domain & time-domain laser thermoreflectance test systems, 3-omega thermal conductivity testers, and thermoelectric test chips. They support multi-mode, wide-range measurement of materials’ anisotropic thermal conductivity and thermoelectric properties. The dual-laser analyzer delivers non-destructive in-plane thermal conductivity testing for thin films. Laser thermoreflectance and 3-omega systems characterize in-plane thermal conductivity and interfacial thermal resistance. The thermoelectric test chip measures thermal conductivity, electrical conductivity and Seebeck coefficient, and works with LINSEIS thermoelectric test equipment.
We also collaborate with multiple Chinese companies to supply compact vacuum deposition systems—including magnetron sputtering, electron-beam evaporation, thermal evaporation, and atomic layer deposition—and offer a range of semiconductor electrical and optoelectronic test equipment, such as 2D material transfer platforms, low-frequency noise test systems, next-generation photodetection characterization systems, and manual probe stations. Driven by technological innovation, MetaThermo (Suzhou) Energy Technology Co., Ltd. is dedicated to delivering premium products and services to customers and advancing the development and application of semiconductor and thermal characterization as well as vacuum technologies. We look forward to cooperating with you to build a brilliant future together!
